Publications ERIS

Retrouver ici l’ensemble des publications de l'équipe ERIS

2016

1. Accuracy of analyses of microelectronics nanostructures in atom probe tomography
   F. Vurpillot, N Rolland, R Estivill, S Duguay, D Blavette
   Semicond. Sci. Technol., 2016. 31: p074002
   https://doi.org/10.1088/0268-1242/31/7/074002